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Electrical properties of Hf-Zr-O films with several thicknesses are studied. Decent ferroelectric performances are obtained in a wide range of film thickness between 6.8 and 41 nm. A drawback in Hf-Zr-O system is that the operation electric filed for the saturated ferroelectric polarization is close to the breakdown electric field. An investigation of coercive field vs. thickness reveals that HfO2-based...
Within the wide variety of statistical techniques used to characterize the occurrence of failure events in metal-insulator-metal (MIM) and metal-insulator-semiconductor (MIS) structures, there is one that has received particular attention in recent years because of its relevance in oxide reliability analysis. Spatial statistics is a specialized branch of statistics aimed to summarize information about...
The paper reports on the search of correlations between the current and emitted light signal, electric field, and propagation velocity associated to positive streamers propagating in mineral oil, tetra-ester and toluene, in a point - plane electrode arrangement, under AC voltage. New correlations, especially between the velocity of positive streamers and the current derivative are established. The...
Polarities of plasma charging damage in n- and p-channel MOSFETs with Hf-based high-k gate stack (HfAlOx/SiO2) were studied for two different plasma sources (Ar-and Cl-based gas mixtures), and found to depend on plasma conditions, in contrast to those with conventional SiO2. For Ar-plasma, which was confirmed to induce a larger charging damage, both n- and p-ch MOSFETs with high-k gate stacks suffer...
Continuous scaling, necessary for enhanced performance and cost reduction, has pushed existing CMOS materials much closer to their intrinsic reliability limits, forcing reliability engineers to get a better understanding of circuit failure. This requires that designers will have to be very careful with phenomena such as high current densities or voltage overshoots. In addition to the reliability issues,...
The importance of polyethylene as an insulating material in low and high voltage applications is well recognized. The measurement of dielectric strengths is, however, even under laboratory conditions, generally beset with numerous difficulties, and results depend to a large extent upon experimental conditions and sample geometry. Within a research program investigating correlations between the electrical...
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