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We studied the elastic properties of γ′-Fe 4 N experimentally and theoretically, as the difference between calculated and measured literature data is up to 31%. A phase-pure γ′-Fe 4 N thin film and a bulk-like sample were synthesized using a reactive magnetron sputtering technique and a two-step ammonolysis reaction, respectively. The elastic moduli were measured to be 157±11 and 159±17GPa,...
A novel microbridge testing method for thin films is proposed. Theoretic analysis and finite element calculation are conducted on microbridge deformation to provide a closed formula of deflection vs load, considering both substrate deformation and residual stress in the film. Using the formula, one can simultaneously evaluate the Young's modulus, residual stress and bending strength of thin films...
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