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A CAD electromechanical model for phase noise simulation has been developed; it allows the simulation of the mechanical and RF behaviour for electrostatic MEMS devices taking Brownian noise into consideration. The model is implemented in commercial circuit software (ADS-based). The model is applied to study the effect of MEMS varactors in oscillator phase noise. The model describes the important nonlinear...
We investigated the effects of electrically connecting multiple microresonators on the frequency noise with a goal to improve the resolution of a chemical sensor based on the capacitive micromachined ultrasonic transducer (CMUT) technology. We fabricated twenty-two 50-MHz CMUTs with varying number of cells and measured the input impedance characteristics. The impedance measurement results show a linear...
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