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We report a 8-12-μm-diameter 210-μm-length penetrating silicon probe array assembled by vapor-liquid-solid (VLS) growth, for use in multi-site recordings of neuron spikes in a brain cortex. A 3-μm-diameter silicon probe-tip metalized with platinum (Pt)-black by the electroplating, exhibits low enough probe impedance of 103 kΩ and a more than 90% output/input ratio (1 kHz) for spike recordings. Through...
To map neural signal in the brain 3D electrodes are desired. 3D electrodes are difficult fabricate due to the cumbersome assembly process. In this work, 2D array of glass electrodes were designed and later assembles into 3D by simple assembly process. Glass was used as a dielectric material to provide better electrical isolation capability and better biocompatibility compared to silicon. Five shanks...
A novel 16-channel flexible thin-film microelectrode array was fabricated and evaluated for epi-retinal electrical stimulation by MEMS (Micro ElectroMechanical System) processing techniques. It was encapsulated by medical-grade silicone adhesive and suitable for in-vivo application. In-vitro testing results showed that the average impedance of the microelectrode array was uniform at different steps...
To real-time monitor the cell viability an important task in cell culturing associated applications. The bioimpedance spectroscopy is one of the useful techniques for this study. In this paper, a culture dish with an electrode-array is designed for the bioimpedance based cellular characterization. The electrode-array containing 32 electrodes is firstly fabricated using the Micro-Electro-Mechanical-System...
This paper presents a very thin silicon dioxide microtube electrode array, which has sub ten-micrometers in inner diameter, as a neural interface device with high signal-to-noise ratio and low invasiveness. The device was realized by using out-of-plane silicon dioxide microtube arrays fabricated from vapor-liquid-solid growth and microfabrication techniques. Here we report advantages of electrical...
There have been significant advances in fabrication of high-density microelectrode arrays using silicon micromachining technology in neural signal recording systems. The interface between microelectrodes and chemical environment brings great interest to researchers working on extracellular stimulation. This interface is quite complex and must be modeled carefully to match experimental results. Computer...
Extracellular neural recording requires neural probes having more recording sites as well as limited volumes. With its mechanical characteristic and abundant process method, Silicon is a kind of material fit for producing neural probe. Silicon on insulator (SOI) is adopted in this paper to fabricate neural probes. The uniformity and manufacturability are improved. The fabricating process and testing...
In this contribution we present a novel disposable micro fluidic biosensor array for parallelized monitoring of cell adhesion during pathogenic infection. The biosensor array consists of 4 bioreactor chips and a flow distribution network. Thus, 4 biological experiments, can be run in parallel. Each bioreactor chip contains 4 quartz crystal resonators (QCRs) with randomly spread cells on top which...
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