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The interaction of substitutional copper atoms (Cus) with interstitial nickel (Nii) or copper (Cui) in crystalline p‐type Si is investigated by DLTS. The mobile interstitial species are introduced at near‐room temperatures by etching in Ni‐ or Cu‐contaminated KOH aqueous solutions. The Cui in‐diffusion is confirmed by the formation of several deep level complexes including the photoluminescence Cu...
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