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The phase composition and chemical bonding of ZrC and ZrSiC films deposited by magnetron sputtering has been studied. The results show that the binary Zr–C films at higher carbon contents form nanocrystallites of ZrC in an amorphous carbon matrix. The addition of Si induces a complete amorphization of the films above a critical concentration of about 15at.%. X-ray diffraction and transmission electron...
The interface between amorphous diamond films deposited by a filtered arc and germanium substrate was characterized by X-ray photoelectron spectroscopy. The coherent energy shifts of carbon and germanium photoelectron lines with prolonged etching time confirm the existence of an amorphous germanium carbide phase consisting of nonhomogeneous components in the interfacial region. This compound forms...
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