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Co-depositions of gold and silica (amorphous silicon dioxide) on silica substrates using the ion beam assisted deposition (IBAD) facility at the Center for Irradiation of Materials at Alabama A&M University (CIM-AAMU) were analyzed for Au concentration, distribution and uniformity within the layer deposited. High resolution RBS using 4 MeV nitrogen ions combined with RUMP simulations accurately...
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