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Sputter-deposited NiTi films on full 100mm wafers exhibit different phases, depending on the wafer region. Comprehensive characterization and analysis show that, unlike the common assumption, this effect is not related to the Ti/Ni stoichiometry. Instead, we show that the different phases are related to differences in grain size. Our results indicate the existence of a critical grain size of approximately...
Polycrystalline alloy thin films of Fe 100-x Pt x with various platinum compositions (x=15, 24, 46 and 78at.%) were synthesized by magnetron sputtering. The variation of platinum content and deposition rate with the platinum area target fraction in the sputtering was studied. It is observed that the X-ray diffraction patterns of as-deposited FePt films...
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