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Ultra-thin films of platinum deposited on highly polished 100 silicon have been investigated using X-ray reflectivity (XRR) and X-ray photoelectron spectroscopy (XPS) as part of a study on the interface structure of multilayers used for X-ray mirrors. In this paper results are presented for films deposited by electron beam evaporation and by DC-magnetron sputtering. The reflectivity was fitted by...
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