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In this paper, we report, for the first time, an investigative study involving the engineering of lightly doped porous silicon nanowire arrays (pSiNWs) by exposing solid silicon nanowire arrays (SiNWs) to an acid vapor emanating from HF/HNO3 hot solution. SEM and TEM images exhibit vertically distributed SiNW arrays on the whole silicon (Si) surface with relatively smooth surface sidewalls. By submitting...
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