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We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates and hard films on soft substrates we are able to assess the effects of elastic and plastic inhomogeneity,...
We have studied the indentation properties of sputter deposited W thin films on single crystal sapphire substrates in an effort to understand the effects of pile-up on the indentation properties of soft films on hard substrates. Hardness and elastic modulus of these films were determined by nanoindentation using a Nano XP . The hardness and elastic modulus were first determined using the Oliver and...
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