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A study on surface oxidation of AISI316L stainless steel surface was performed. Stainless steel was oxidized in air plasma with a high degree of dissociation of oxygen molecules of about 70%. The resultant flux of oxygen atoms to the surface was about 1×10 24 m −2 s −1 . The oxidation was performed at high temperatures ranging up to 1250K. The oxidation time was 5min. After...
Auger electron spectroscopy (AES) depth profiling was used to study the oxidation phenomena of AISI316L stainless steel during treatment with oxygen plasma. Samples were exposed to low-pressure RF plasma with a high dissociation degree, so that the flux of oxygen atoms onto the sample surface exceeded 10 24 m −2 s −1 . A set of samples was oxidized 4min at different temperatures...
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