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IEEE Transactions on Semiconductor Manufacturing > 2010 > 23 > 2 > 246 - 254
IEEE Transactions on Semiconductor Manufacturing > 2010 > 23 > 3 > 468 - 476
IEEE Transactions on Semiconductor Manufacturing > 2010 > 23 > 2 > 246 - 254
IEEE Transactions on Semiconductor Manufacturing > 2010 > 23 > 3 > 468 - 476