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IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 4 > 410 - 417
IEEE Transactions on Plasma Science > 2009 > 37 > 8-2 > 1581 - 1585
2007 7th IEEE Conference on Nanotechnology (IEEE NANO) > 1227 - 1230
IEEE Transactions on Semiconductor Manufacturing > 2017 > 30 > 4 > 410 - 417
IEEE Transactions on Plasma Science > 2009 > 37 > 8-2 > 1581 - 1585
2007 7th IEEE Conference on Nanotechnology (IEEE NANO) > 1227 - 1230