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This paper presents the implementation of a MEMS tunable inductor using admittance J-inverters and a variable capacitor. The tunable inductor circuit consists of two inductors, two fixed capacitors and a variable capacitor. The MEMS tunable inductor has been fabricated using the CRONOS MUMPs® Process. Design details and results are presented for a tunable inductor designed to operate over a bandwidth...
This letter presents a new microelectromechanical system-based tunable LC filter that utilizes a tunable capacitor and a tunable inductor in a single device. An electrically floating metal plate is located between the tunable capacitor and the tunable inductor. As the floating metal plate is thermally moved and used commonly for both the capacitor and inductor, the device provides an ultra-wide continuous...
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