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In this paper, new MEMS capacitive pressure sensor based on p++silicon diaphragm have been designed and characterized. Two sensor designs incorporating clamped and slotted diaphragm are implemented and compared to realize the pressure-sensitive components. The pressure sensor has been designed to measure pressures in the range of 0 to 60 mmhg that is in the range of intraocular pressure sensors. Intraocular...
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