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Consider the problem of estimating the position and the velocity of an emitter given time and frequency differences of arrival acquired by a passive sensor array. By jointly eliminating the non-linear nuisance parameters of the model using an appropriate orthogonal projection, we obtain a least squares estimator of the parameters of interest. The advantage of the proposed estimator is the reduction...
The overlay modeling errors are commonly modeled as the sum of inter-field and intra-field errors in lithography process of wafer stepper. The inter-field errors characterize the global effect while the intra-field errors represent the local effect. To have a better resolution and alignment accuracy, it is important to model the overlay errors and compensate them into tolerances. This paper proposes...
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