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Pure and Iron incorporated nanostructured Tungsten Oxide (WO3) thin films were investigated for gas sensing applications using noise spectroscopy. The WO3 sensor was able to detect lower concentrations (1 ppm-10 ppm) of NH3, CO, CH4 and Acetaldehyde gases at higher operating temperatures between 100??C to 250??C. The response of the WO3 sensor to NH3, CH4 and Acetaldehyde at lower temperatures (50??C-100??C)...
Tungsten oxide (WO3) thin films were investigated to detect trace amount of nitric oxide (NO) and methane gases in air. WO3 thin films were deposited between micro-patterned gold electrodes and annealed at 500degC in air for 2 hours. The as-deposited films exhibited an amorphous structure and annealed films indicated crystalline WO3 with the average grain size of 40.3 nm. The crystallinity and surface...
A 440 MHz wireless and passive surface acoustic wave (SAW) based micro-sensor was developed on a 41deg YX LiNbO3 piezoelectric substrate for simultaneous measurement of CO2 and NO2. The developed sensor consists of a SAW reflective delay lines structured by an interdigital transducer (IDT), ten reflectors, CO2 sensitive film (Teflon AF 2400), and NO2 sensitive film (Indium Tin Oxide). The coupling...
SnO2 thin film sensor was fabricated with microelectronic technology and NH3 (ammonia) gas sensing characteristics were measured in a temperature range 200-375degC. It was observed that surface doping with platinum improves significantly the material's sensitivity to ammonia, and the optimal operational temperature of the sensor was 325degC. The sensor showed high sensitivity to low NH3 concentration...
We present a front-side micromachined thermopile with high sensitivity in the 3-5 mum window, and discuss its application to a novel non-dispersive infrared (NDIR) CO2 gas sensor with a light source emitting collimated light. The micromachined thermopile shows a measured sensitivity of 30 mV/W and a D* of 0.3 times 108 cmradicHz/W. Using this newly fabricated thermopile, we also have successfully...
The perspective of semiconductor gas sensors was presented. The review of existing gas sensors was given. The method, allowing to determine the concentrations of several gases by one sensor was offered.
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