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The results of investigations of elemental composition and electric surface resistance of alumina insulators after the high-energy metal ion implantation are presented. Energy dispersive X-ray, RBS and SIMS analysis were used to determine composition of elements and their distribution in the surface of the implanted ceramics. Measurement of the sheet resistance was performed from analysis of volt-ampere...
The results of metal ion implantation into alumina ceramic are presented. We show that the of ceramic surface resistivity depends on the metal ion spcies used for the implantation, and decreases with increasing metal ion implantation dose, decreasing by 3–4 orders of magnitude from 1012 Ohm/sq. This approach provides an effective tool for bleeding off accumulated surface charge of ceramic components...
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