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IEEE Transactions on Plasma Science > 2009 > 37 > 10-2 > 2082 - 2089
IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 2 > 305 - 316
IEEE Transactions on Plasma Science > 2009 > 37 > 10-2 > 2082 - 2089
IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 2 > 305 - 316