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In this paper, we describe the ac resistance of a coil using a magnetoplated wire (MPW), which is prepared by circumferentially plating a copper wire with magnetic thin film. The Q value of the MPW coil is higher than that of a coil using a copper wire without magnetic thin film plating (COW coil). High-Q coils have lower loss and are required in various industrial fields. To further improve the Q...
A full Cu damascene metallization process was successfully developed for simultaneous formation of sub-0.18 /spl mu/m RF CMOS passive components including circular spiral inductor and MIM capacitor. High quality factor inductor with Q=18 at 1.2 nH was achieved by applying highly uniform Cu CMP process on polishing microns of Cu. Less than 2% Rs uniformity and 70 nm dishing on 95% density Cu line were...
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