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The needs for materials in thin films characterization are increasing with the raising interest for Micro-Electro-Mechanical-Systems. Picosecond ultrasonics (PU), a non-contact and non-destructive technique, has been largely developed to answer the mechanical metrology requirements of thin films technology, particularly in the field of Bulk Acoustic Wave (BAW) resonators. The PU technique uses a pulsed...
This paper presents a miniaturized 2.5GHz frequency source based on compensated BAW resonator with its integrated temperature molybdenum sensor assembled on the differential Colpitts oscillator. The presence of silicon dioxide layer having a positive temperature coefficient compared to other layers is used to reduce the resonator's drift. A demonstration oscillator achieves a frequency drift of 40...
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