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Journal of Microelectromechanical Systems > 2010 > 19 > 5 > 1029 - 1040
IEE Proceedings A - Physical Science, Measurement and Instrumentation,... > 1989 > 136 > 1 > 41 - 44
Journal of Microelectromechanical Systems > 2010 > 19 > 5 > 1029 - 1040
IEE Proceedings A - Physical Science, Measurement and Instrumentation,... > 1989 > 136 > 1 > 41 - 44