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For the first time, we demonstrate the detection of carbon dioxide (CO2) using a non-dispersive infra-red (NDIR) technique that does not require an expensive CMOS-incompatible optical filter. This is achieved by employing a differential IR thermopile detector with micro-engineered (plasmonic) optical properties, fabricated in a commercially available standard CMOS MEMS process. The proof of concept...
This paper reports on the demonstration of narrowband uncooled microelectromechanical resonant infrared detectors based on ultrathin perfect plasmonic absorbers. The integration of a deeply subwavelength thin (230 nm) plasmonic absorber on a piezoelectric nano plate (480 nm) enables a near perfect and narrowband absorption of mid-wavelength infrared radiation (∼92% at 4.7 μm with a full width at half...
Recently, nano-structures have been adopted for the photonics-based THz emitters and detectors to enhance their output power and detection sensitivity. The notable improvements have been attributed to the plasmon enhanced absorption. However, we found that the field enhancement at the extremities of the nano-structure dominates over the plasmon effect, may be maximized by considering nano-scale ultrafast...
In this paper, we describe the application of novel MEMS CMOS infrared (IR) sensors for developing compact filter-less occupancy detections. Using such sensors we will report the feasibility of this application in terms of the: sensitivity; response time and selectivity with and without the plasmonic structure. Furthermore, we will compare the detection range, field of view and the size of object...
Over the decades, Mercury Cadmium Telluride (HgCdTe) has been widely used as a detecting material in conventional IR photodetectors. While HgCdTe material properties have been well understood to use for the semiconductor structures, they have not yet been extensively exploited for the use in metasurfaces, i.e., by engineering the dispersion of surface plasmon in metasurfaces, the incident electromagnetic...
A Schottky-Barrier-Detector structure consisting of an array of metallic nanodisks embedded in Si-waveguide achieving ∼96% of total power absorption is proposed. This structure provides a step forward towards fully CMOS-compatible photonic-electronic integrated circuits.
We demonstrate self-aligned fabrication of etched silicon fins in metallic slits and show that this structure supports both dielectric and plasmonic resonances and photodetection that can be tuned by varying the width of the fin
We demonstrate an efficient nanoscale electrical detector for propagating surface plasmons, tightly confined to nanoscale silver wires. Our technique is based on the near-field coupling between guided plasmons and a nanowire field-effect transistor. We demonstrate that this near-field circuit can efficiently detect the plasmon emission from a single quantum dot that is directly coupled to the plasmonic...
We demonstrate a multi-spectral polarization sensitive mid-infrared photodetector utilizing surface-patterned plasmonic resonators. This design provides a responsivity enhancement of up to 5x while adding only one lithography step to current focal plane array processing.
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