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Losses as low as 0.4 ? 0.1 dB/cm for TE- and 0.65 ? 0.1 dB/ cm for TM-polarised light have been observed in tightly confined single-mode InP/lnGaAsP waveguides grown by MOVPE and processed using RIE. These are the lowest losses reported for InP-based waveguides. The structure could be used to make low-loss modulators for communications wavelengths.
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