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The nanoscale (EOT<;6 nm) flash and resistive switching memories using IrOx nanocrystals have been investigated. The IrOx nanocrystals embedded in high-κ Al2O3 film are observed by both high-resolution transmission electron microscopy and x-ray photoelectron spectroscopy. The average size and density of IrOx nanocrystals are found to be ~3 nm and ~7×1012/cm2, respectively. The flash memory devices...
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