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We report on the design, fabrication, and testing of a two-axis stage that was used to move a cantilever arm. We utilized Sandia National Laboratories' MEMS foundry process that incorporates five levels of polysilicon and four sacrificial layers of silicon dioxide. The X-Y stage was actuated with the full 110 mum of travel in both dimensions. To demonstrate the travel of the stage, a cantilevered...
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