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AlGaN based deep ultraviolet light emitting diodes (DUV LEDs) are key components in systems for air, water, and food purification and germicidal applications. Because of the heteroepitaxial growth of the DUV LED epilayers on sapphire, they have a large number of dislocations that invariably leads to a reduction of quantum efficiency and lifetime degradation. In this paper, we present our recent work...
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