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Typical perovskite oxides SrTiO3 (STO) and PbZr0.52Ti0.48O3 (PZT) were fabricated on GaN semiconductor substrates by pulsed laser deposition. STO and PZT films were deposited on bare GaN, TiO2, and MgO-buffered GaN. The effects of TiO2 and MgO buffer-layers on the orientations and electric properties of the perovskite films were systematically studied. The crystalline properties were in situ monitored...
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