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ZrC thin films were grown on Si substrates by the pulsed laser deposition (PLD) technique under various conditions. X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), X-ray diffraction and reflectivity, spectroscopic ellipsometry, and four point probe measurements were used to characterize the properties of the deposited films. It has been found that crystalline films could...
The deposition of LaB 6 thin films by the pulsed laser deposition (PLD) technique was investigated. X-ray photoelectron and Auger electron spectroscopy (XPS, AES), X-ray diffraction and reflectivity were used to characterize the properties of the deposited films. It has been found that crystalline films could be grown only by using laser fluences around 10J/cm 2 or higher and substrate...
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