The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
We review our current understanding of the degradation mechanisms in scaled interconnects. Concerns on the applicability of today's reliability evaluation methods are expressed. Regarding electromigration (EM), both scaling line dimensions and using mechanically weaker intermetal dielectrics (IMDs) have a negative impact on its performance, where remedial measures to overcome this downward trend are...
We investigate the impact of process variability on BEOL TDDB lifetime model assessment. The change in functional form of TDDB lifetime plots due to line-to-line variability and line-edge-roughness has been quantified in the field range in which long term TDDB measurements have been obtained. We found that the Pearson R2, which is used as a measure of linearity of a lifetime plot, did not significantly...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.