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TiO 2 nanoceramic films were deposited on glasses by rf magnetron sputtering. This method provides more advantages in controlling the microstructure and composition of the films. TiO preferentially formed and the deposited films tended to become nonstoichiometric by increasing substrate temperature. The morphologies and hydrophilic properties of TiO 2 films were significantly affected...
The Al-doped TiO 2 (TiO 2 :Al) films were deposited by simultaneous RF (Radio Frequency) magnetron sputtering of TiO 2 and DC (Direct Current) magnetron sputtering of Al. The advantage of this method is that the Al content could be independently controlled. TiO was more favorable to form and the deposited films became nonstoichiometric by increasing RF power density. The morphologies...
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