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AlGaInAs-InP microcylinder lasers with an output waveguide surrounded by benzocyclobutene are fabricated, using standard photolithography and inductively coupled-plasma etching technique. Room-temperature continuous-wave (CW) operation is realized for a microlaser with a radius of 20 and a 2--wide output waveguide. Single-mode operation with side-mode suppression ratio around...
Theoretical analysis and numerical simulation are presented for triangle and of square optical microcavities connected with an output waveguide. The mode behaviours are also simulated for an equilateral triangle resonator confined by metal layers. Furthermore, triangle and square InP/InGaAsP microcavity lasers are fabricated by ICP etching technique, and room temperature CW operation are realized.
Directional emission triangle and square InGaAsP/InP lasers have been fabricated by standard photolithography, inductively coupled plasma etching technique combined with wet chemical etching process. In this article, the characteristics of the microcavity lasers are presented. For an equilateral triangle microcavity laser with the side length of 30 mum, we got the laser spectra fitted very well with...
By die to wafer bonding of InP heterostructure on 200 mm wafer, microelectronics type fabrication of mu source has been achieved using DUV lithography. LED emission was only obtained due to slanted etching of the cavity.
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