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The paper examines the effects of ion bombardment flux (ji) on film characteristics, under the conditions when ion energy (Ei) and the ratio of the ion flux to the flux of deposited atoms (ji/ja) were kept constant, considering nickel carbide films deposited on Si(100) and C45 steel substrates by the cathodic arc method in a CH4+Ar mixture. The substrate current density was varied from 2.7 to 5.1...
This work aims to investigate the influence of the energy and flux of the ions striking the substrate on the characteristics of the ZrCN coatings deposited by cathodic arc method. The coatings were investigated for elemental and phase composition, chemical binding state, texture, residual stress, hardness, adhesion and tribological behavior using GDOS, Raman spectroscopy and XRD techniques, surface...
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