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Incorporating sensors onto a flexible substrate will add functionality to flexible displays. Though several attempts have been made to mount MEMS sensors on flexible substrates, none of the sensors have been integrally fabricated on the substrate. Fabricating MEMS sensors on flexible substrates along with display elements will provide new sensing capabilities and enhance functionality. We propose...
This paper presents the manufacturing of a flexible 192-elements curvilinear CMUT array developed using our patented reverse fabrication process. In this process the silicon nitride CMUT membranes are surface micromachined over a silicon substrate such that the non-radiating surface of the transducer corresponds to the last layer deposited, while the radiating membranes are uncovered by completely...
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