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A large batch PECVD system has been developed in order to deposit a-Si/a-SiGe and a-Si/muc-Si solar cell on 20 pieces of SnO2-coated glass with the area of 0.8 m2. Newly designed electrode has been used in order to achieve uniform muc-Si film on 0.8 m2. Beside muc-Si nlayer, p(muc-SiO) has been used in the p-layer of the bottom cell in order to increase the module performance. Alcohol flush has been...
High efficiency amorphous/microcrystalline silicon solar cell fabricated on stainless steel substrate have been developed by using a multi-chamber system in which all layers can be deposited without breaking the pressure on 30 cm/spl times/40 cm area. The detailed cell structure is hot Ag/ZnO/n(/spl mu/c-Si)-i(/spl mu/c-Si)-p(a-Si) or p(/spl mu/c-Si)/ZnO/n(/spl mu/c-Si)-i(a-Si)-p(/spl mu/c-Si)/ITO...
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