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This paper reports on the design and fabrication of a neural probe for simultaneous recording of neural activity and localized drug delivery. In comparison to common microfluidic probes, additional electrodes facing the fluidic channel are integrated in the polyimide-based membrane covering the microchannels. The novel fabrication process applies two-sided deep reactive ion etching (DRIE) of silicon...
Cracks patterned lithographically into the buried oxide (BOX) layer of silicon-on-insulator wafers were found to substantially improve yield in the release of ultrasoft silicon cantilevers. The BOX layer is useful as an etch stop and sacrificial layer in microfabrication. However, compressive stress in the BOX membrane can cause it to buckle and crack when released. These cracks can damage delicate...
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