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In this paper, fundamental theories in developing piezoresistive pressure sensor will be discussed and our work on designing a foot plantar measurement system as the application will be explained. The mathematical equations and design procedures will be elaborate while the practical application will be investigate, experimented and analyzed. Simulation results from design theory will also be included...
The paper presents a piezoresistive absolute micro-pressure sensor for altimetry. This investigation includes the design, fabrication and testing of the sensor. An improved structure is studied through incorporating sensitive beams into the bossed-diaphragm structure. By analyzing the stress distribution of sensitive elements using finite element method (FEM), the configuration shows an enhanced sensitivity...
Presented is a piezoresistive absolute micro-pressure sensor, which features relatively high sensitivity and overload resistance simultaneously. In this investigation, the design, fabrication and testing of the sensor are carried out. By analyzing the stress distribution on sensitive elements using the finite-element method (FEM), an improved structure through introduction of sensitive beams and islands...
This paper presents an electrostatically-driven and capacitively-sensed resonant pressure micro sensor. The device was fabricated based on a SOI wafer requesting only 2 masks and simplified micro-fabrication steps including DRIE, sputter and wet etching. The sensor was quantified by an open loop system, producing a Q-factor higher than 10430 in vacuum (less than 0.5 Pa). The resonant frequency was...
This paper reports on the development and characterization of a novel CMOS-based, low-cost, high-pressure sensor with inherent overload protection. The sensor consists of an anodically bonded silicon-Pyrex stack with surface trenches micromachined into the CMOS substrate. Due to the difference in elastic moduli of silicon and Pyrex, an applied hydrostatic pressure causes an anisotropic stress distribution...
A type of NEMS double Si3N4 resonant beams pressure sensor is presented in this paper. The maths models are established in allusion to the Si3N4 resonant beams and pressure sensitive diaphragm. Based on the maths model of Si3N4 resonant beams, the relation between the resonant frequency and key dimensions of Si3N4 resonant beams is analyzed. Based on the maths model of pressure sensitive diaphragm,...
Based on the sensing mechanism of microsensor, a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring pressure is established. The relationship between the basic natural frequency of the beam resonator and the pressure is calculated, analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the...
In this communication we present a new and different approach based on electromagnetic transduction principle, which can be used for long distance covering pressure measurement. Previous work reported by the authors has validated the principle of the electromagnetic transduction for 400 mum silicon membrane thickness and with the hypothesis of uniform vertical membrane displacement. In this new report...
This paper presents a piezoresistive pressure sensor to enhance sensitivity using silicon nanowire. According to published paper, silicon nanowire under 340 nm has good piezoresistive effect. Silicon nanowire of 140 times 200 nm2 size has seven times more piezoresistive effect than bulk silicon. This paper proposes the piezoresistive pressure sensor using the high piezoresistive effect of the silicon...
Cell phone, medical, white goods and other markets are looking for absolute pressure sensors as well as differential pressure sensors. From a customer point of view these two configurations means to have one or two pressure ports, which could require a piping interface if the measured pressure is not the ambient one. For ambient measurement the MEMS LGA module needs only onean hole, which connect...
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