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In recent years, explosive based terrorism has grown enormously; moreover, chemical warfare is forecasted as the next terror inflicting agents. Detecting such materials is a challenging task. Aiming towards "artificial nose", we take advantage of highly sensitive porous silicon microcantilevers devices in combination with non specific polymer layers and monitor their interaction with target...
Integrated sensors based on microelectronic technology were first developed in the late 60s for medical applications. Today they have evolved into wireless integrated microsystems (WIMS), combining micropower circuits, wireless interfaces, hermetic packaging, embedded power sources, and MEMS. Such devices are poised to provide important breakthroughs in health care. This paper traces the development...
Silicon smart microchips with CMOS/MEMS technology are realized for intelligent sensing. In our developed chips, tow new type sensor chips are presented here. One is Si microprobe electrode array for using in the recording of neurons in the tissue. The probe array can be fabricated on IC chip, using standard IC process followed by a selective Si probe growth. Another one is pH image sensors successfully...
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