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IEEE Sensors Journal > 2011 > 11 > 5 > 1120 - 1128
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 4 > 482 - 487
IEEE Sensors Journal > 2011 > 11 > 5 > 1120 - 1128
IEEE Transactions on Semiconductor Manufacturing > 2007 > 20 > 4 > 482 - 487