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Semiconductor manufacturing is an industry with high cost. Improvement of production efficiency is always an important goal for manufacturers. Run-to-run control has been widely used in batch manufacturing processes to reduce variations. Threaded EWMA run-to-run control is an important stable control scheme. In this paper mixed products are manufactured in cycles. However, the process outputs will...
For several decades, the output from semiconductor manufacturers has been high volume products with process optimisation being continued throughout the lifetime of the product to ensure a satisfactory yield. However, product lifetimes are continually shrinking to keep pace with market demands. Furthermore there is an increase in dasiafoundrypsila business where product volumes are low; consequently...
The linear scaling principles for MOS technology presented by Dennard and others in 1974 created a framework for continued improvement in density and cost performance and facilitated the desegregation of the entire industry around design and manufacturing. Few concepts in our time have had as much influence on the economy.
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