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Using ultrasharp conductive tip atomic force microscopy (c-AFM), we have measured the current voltage (I-V) characteristics of titanium ions implanted into polystyrene thin film spin coated onto silicon substrate. The surface morphology and the electric current between the tip and sample have been obtained simultaneously on the nanometer scale. Initial island-like growths structures were observed...
Crystallised Co nanoparticles were synthesized by Co+ implantation onto thermally oxidised SiO2 layers on silicon substrate. The implantation energy was 50 keV and the doses ranged from 1 to 7times1016 Co+/cm2. The possibility of controlling the size and distribution of the nanoclusters by changing implantation conditions (e.g. dose and energy) is the main advantage of this technique. Atomic force...
We have studied changes to the surface potential of thermally grown oxides on silicon implanted with 15 keV P or Si using Kelvin-probe force microscopy (KFM). Oxides of 15 nm thickness were implanted through photoresist masks to create disk like islands of 3 mum diameter in the underlying silicon substrate with fluences up to 1times1014 cm-2. Atomic force microscopy shows no change to the topology...
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