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A new type of precision flow valve is designed by used the combination of piezoelectric ceramic and metal rubber, the mathematical model that possesses flow characteristics at the valve outlet is established based on Darcy's law and Newton's first law, the influence of different driving voltage and different parameters of metal rubber ring on flow characteristics is analyzed through using MATLAB software,...
Micro-titration technique, based on the condition of precision and ultra-precision, is an important part in Modern Micro-flow control technology and is also one of key technologies in Nano technology in 21st Frontier Technology. In this paper we built a precise flow valve model driven by piezoceramics and then drive the flow valve spool using the inverse piezoelectric effect of piezoelectric ceramics...
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