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is obtained by keyword analysis for different time periods and research field maps. The integrated method is applied on etching technology which is a material processing technology particularly important for semiconductor industry. On the basis of the results obtained in the practice of etching technology, six different
relevant publications. Secondly, to increase the reliability of the forecasting effort, we propose the use of automatically generated keyword taxonomies, allowing the growth potentials of subordinate technologies to be aggregated into the overall potential of larger technology categories. A proof-of-concept implementation of
academic papers having the “environmental” and “electronic” phrases on “Title”, “Abstract” or “Keywords” were retrieved and analyzed using bibliometric analysis methodology. These two adjectives has been selected on purpose since current studies on textual analysis indicate that phrase building most frequently starts after
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