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This work proposes to use capacitive micro-electro-mechanical systems (MEMS) switches built on a superconducting microstrip hairpin filter to investigate the reliability of MEMS for long term survivability. This device is made of a YBa2Cu3O7 thin film deposited on a 20 mm × 20 mm LaAlO3 substrate by pulsed laser deposition and BaTiO3 by RF magnetron sputtering, which is utilized as a dielectric insulation...
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