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This paper reports a novel pattern transfer method which can transfer two patterned metal films from one single mold to two separate polymer substrates. The first metallic film is defined by the top convex surface of a silicon mold and is transferred to a polymer substrate directly from roller-assisted contact printing and infrared heating. The second metallic film, which is defined by the bottom...
In this study, we present a novel three-level pillars silicon master to fabricate the transparent polydimethylsiloxane (PDMS) biochip with 1 ??m aperture. The three-level pillars silicon master was manufactured by photolithography and ICP etching processes. Especially, we use the IR (image reversal) mode to fabricate the third pillar in silicon master for increasing the successful rate. Due to the...
In this work we report on the technology for enabling the mass replication of custom-designed and e-beam lithographically prepared structures via establishing UV-NIL nanoimprint processes for pattern transfer into UV curable pre-polymers. The new nano-fabrication technology based on the concept of disposal master technology (DMT) is suitable for mass volume manufacturing of large area arrays of sub-wavelength...
In the current fabrication of pressure sensor, both the sensor cavity and the sensor diaphragm were made of SU-8 which can be readily spun coat on the substrate at desired thickness and patterned by lithography. The thickness of the diaphragm, and the height of the sensor cavities, allowing deformation of diaphragm, can be readily varied from few to hundreds of microns by spin coat different thickness...
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