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This paper presets the assembly of a nanowire probe pH sensor. An AFM cantilever was used for electrodes of the device and etched by FIB. Two carbon nanotubes (CNT) were assembled to the separated electrodes of AFM cantilever. A tungsten probe is etched by focused ion beam (FIB) into 300 nm in diameter and 25.4 μm in length. Then the probe is coated by parylene and cut the tip to open the tungsten...
CMOS integrable nonenzymatic glucose microsensors with nanoporous platinum (Pt) working and counter electrode (WE/CE) were first fabricated, packaged, and characterized with biocompatible Nafion and hydrophilic polyurethane (HPU) membrane materials. Optimal packaging material and its processing condition for these nonenzymatic sensors were investigated. The optimally packaged glucose microsensor was...
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