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Subwavelength horizontal Al/SiO2/Si/SiO2/Al plasmonic slot waveguides with SiO2 width at each side of ~15 nm and Si width of ~136, ~87, and ~43 nm are fabricated on SOI substrates using fully CMOS compatible processes. The propagation losses at 1550 nm TE are ~1.01, ~1.31, and ~1.56 dB/μm, respectively, as measured by the standard cutback method. A simple taper coupler with length of ~0.3-1 μm provides...
Slot waveguides formed either in high-index dielectrics or in metals attract great interest because they provide sub-wavelength confinement in the slot region. While this feature is very attractive for devices relying on stimulated emission or nonlinear effects, it does not necessarily improve the integration density. The spacing between dielectric slot waveguides is still limited by diffraction....
Future ultracompact photonic integrated circuits (PICs) will rely on high-index-contrast dielectric materials, which permit a strong confinement of the optical field in the diffraction limit as well as low propagation losses. This is the case of PICs implemented on a silicon-on-insulator (SOI) platform. To achieve confinement beyond the diffraction limit, plasmonic waveguides (based on metal-dielectric...
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