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Thin film properties (resistivity, sheet resistance, optical transmissivity, stability testing under RH85/85C conditions and film stress) were measured for indium tin oxide (ITO) and Al-doped Zinc Oxide (ZnO) (2 wt.% Al doped target) films deposited using a confocal RF magnetron sputtering system. A comparison was made between sample biasing and high temperature conditions with respect to these properties...
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