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Journal of Microelectromechanical Systems > 2009 > 18 > 5 > 1062 - 1076
Journal of Microelectromechanical Systems > 2008 > 17 > 5 > 1120 - 1134
Journal of Microelectromechanical Systems > 2009 > 18 > 5 > 1062 - 1076
Journal of Microelectromechanical Systems > 2008 > 17 > 5 > 1120 - 1134